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I-Photonics - Model ORTUS 900 -Plasma Ion Assisted Deposition Coater
The ORTUS 900 is an advanced Plasma Ion Assisted Deposition (PIAD) coater designed to accommodate larger substrates compared to its predecessor, the ORTUS 700. This technology integrates ion/plasma treatment with electron beam evaporation or other PVD methods, enhancing film growth dynamics to produce superior optical and adherent coatings. The system supports a variety of technological devices, including Electron Beam Evaporation with customized crucibles, cleaning and assistance sources with multiple ion current density options, resistance evaporation sources, and comprehensive coating process controls. Configuration options include a substrate holder, substrate heating systems using IR lamps or tubular heaters, and an optical process monitoring system for monochromatic monitoring. This setup is optimal for achieving high-density conformal optical coatings and durable compound material coatings on complex surfaces.
2. Technological devices
- Electron Beam Evaporation (EBE)
3 different sizes EV M-6, EV M-8, EV M-10
Customized crucibles, 1 ... 12 pockets
Max. quantity : 2 pcs
- Cleaning and Assistance sources
End-Hall ion source with Ion Current Density up to 1 mA/cm^2
Accelerator with anode Layer (Ion Current Density up to 4.2 mA/cm^2)
Copra: RF Plasma Assist Source (Ion Current Density up to 2.5 mA/cm^2)
Max. quantity : 1 pcs
- Resistance evaporation source
Max. quantity : 1 pcs together with 2 EBE
3. Coating process control
- Rate and thickness control system (quartz control)
- Optical process monitoring system OCP
OCP Singlewave for monochromatic monitoring
4. Accessories
Substrate heating system
- IR lamps
- Tubular heater
