Phillip Technologies, LLC
Phillip - Model Inficon -Replacement Quartz Crystal Sensor
Replacement quartz crystal sensor for use in thin film deposition monitors and controllers including Inficon, Maxtek, Sigma Instruments, and Sycon instruments.
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- Material: Pure Silicon Dioxide monocrystal, Electronic Grade Quartz with Bechmann optimized Geometry and enhanced energy trapping of the fundamental mode.
- Dimensions: 0.550” +. 000/. 002” OD
- Contour: 2.5 - 3.0 diopter (212-177 mm radius of curvature) plano convex
- Finish: 7 microns rms roughness plano and contour sides
- No chips, scratches or etch marks within a 13.95 mm diameter clear aperture
- Electrodes: “Inficon” pattern back, fully coated crystal face
- Available Frequencie: 5 and 6 MHz, fundamental series resonance
- Resistance: <10*-15 Ohms, plated *alloy only
- Contact Resistance: <10 Ohms edge to edge on pattern side
- Spurious Modes: First Anharmonic >150 KHz above fundamental