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Synertia® - RF Power Delivery Platform
FromComet Group
Users fully control the unique performance accelerators of Synertia® RFG, including repeatability, multi-level pulsing, and high-speed communication. This responsiveness provides actionable insights and enables more complex plasma applications than have ever been possible before: a new level of deep control. Thus, higher yield is the result of Synertia®'s fast and agile process control, which delivers superior repeatability, faster tuning, and custom wave-shaping.Most popular related searches
- Power accuracy and repeatability
- Multi-level pulsing (four user definable levels)
- Customizable frequency tuning per level
- Versatile arc management
- Digital metrology and intuitive graphical user interface
- Digital system control for advanced manufacturing technologies
- Seamless integration into process systems
- Ultra-fast plasma process control
- Tighter repeatability delivers improved yield
- Fast configurable rise/fall time of pulsing
- Consistent process and wafer level uniformity
