Sputtering Components, Inc. (SCI)

SCIModel SM-Series -Largest External-Mount End Block

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Our largest external-mount end block, the SM can accommodate targets up to 4000 mm (supported) and has a power rating of up to 200 kW DC or 80 kHz MFAC. It uses the same patented technology as our internal end blocks to deliver outstanding value, performance and reliability but has a wider substrate coverage and customizable drive shaft length.

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Fill and drain
Patented; water completely fills the target for cooler operating temperature/high power; completely drains for target changes

Drive bearings
Exclusive to SCI; tested to verify years of trouble-free operation

Power transfer
Brushless, patented; no brushes to replace and no carbon brush dust; high power rating and reliable power transfer

Vacuum, water seals
Dual lip and redundant; tolerate running dry; easily replaced without removing the end block; can be monitored

Target attachment
Attaches to targets from any vendor for economical sourcing; high load bearing; fast target changes

Mounting
Can be mounted in any orientation using existing mounting holes and utility connections; externally adjustable sputter angle

Drive
Robust, reliable inverter-duty motor and belt drive; motors mounted inward, outward or anywhere around the housing; monitored rotation

Type

Simple, singled-ended design with outboard support if required for quick target changes, high reliability and easy maintenance; for 125 mm ID targets

Electrical rating

200 kW; 1500 V / 450 A

(DC or 80 kHz AC)

Target maximum length

4000 mm

Maximum load

2000 kg horizontal

400 kg vertical

Dimensions

See the dimensional drawings

Maintenance

Typical requirements:

  • Seal kit and bushings every 2 years (1 hour); The end block can stay mounted with external utilities attached.
  • Static seals, bearings and belt after 10 years (3 hours)
  • Do-it-yourself on your schedule and in your facility. Instructional videos are available.

Custom tools available