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EPITORR - Semiconductor Wafer Processing Analyzer
CIC Photonics, Inc. is dedicated to providing today’s growing industries with the highest sensitivity and fastest time response instrumentation. Our analyzers are used worldwide in a variety of different arenas, and although CIC Photonics has a set of core systems, we pride ourselves on truly meeting the needs of our customers by adapting the core analyzers to their specifications.
Our EPITORR incorporates a rugged FTIR spectrometer with a stainless steel 6m 4Runner gas cell. This combination produces an analyzer that can handle some of the most demanding semiconductor wafer processing applications, while still providing high energy throughputs of 36-48 %. The EPITORR is ideal for applications requiring limits of detection in the 10 ppb level to ppm, in a transportable unit and with rapid gas exchange due to it’s low internal volume.
Included with the EPITORR is CIC Photonics patented SPGAS/SpectraStream analytical software package. This package does everything from concentration tracking and hardware managing to allowing the user to recalculate previously collected data within minutes.
- Measures moisture in batch load lock, transfer chamber and process chamber
- In-Situ leak detection after preventive maintenance in systems that have seen process gases
- Process gas concentrations- monitor effects of cylinder changes
- Degradation of reactor O-rings by the detection of HF
- Monitoring the life of gas purifiers