Semiconductor Zone Valve Assembly

The zone valve assembly is used to control the air/N2 and water/DI water discharge to the twin fluid, low pressure, water mist nozzles.
The zone valve assembly consists of the following main items: PVDF ball valve for potable water/deionized (DI) water, Stainless steel (SS) – 316L pneumatic angle globe valve for air/N2, Flow confirmation switch, High/low supervisory pressure switches for air/N2 & water/deionized water, Low pressure solenoid valve. The water/DI water zone valve assembly may also be provided in polypropylene material, based on customer specific requirements. *The operating pressures for the high/low supervisory pressure switches are set based on the individual customer installations.