Spellman - Model FIB - Integrated Multiple Output High Voltage Power Supply
From E Beam/IBeam
Spellman’s FIB Series is an integrated multiple output high voltage power supply specifically designed for focused ion beam applications. It incorporates a high stability accelerator voltage with the floating outputs to drive traditional Ga Ion and Plasma Sources. An additional Lens Chassis is available, providing the high performance fixed or reversible polarity high voltage lenses required to focus the Ion Beam. Both the Main Chassis and Lens Chassis are 19” rack mountable. Focused Ion Beam is typically used in the semiconductor industry, materials science and increasingly in the biological field for imaging, etching and deposition of materials.
The Main Chassis provides an Acceleration voltage ...
The Main Chassis provides an Acceleration voltage up to 35kV, with floating Filament, Extractor and Suppressor outputs, all designed to the exacting performance requirements for FIB applications. The Lens Chassis offers Lens voltages up to 30kV, with fixed or Reversible polarity. All outputs are offered with ultra-low output ripple, excellent regulation, stability, temperature coefficient, drift and accuracy specifications. Isolation and control of the respective floating sources is provided via Spellman’s proprietary high voltage isolation techniques. Customer control of this integrated FIB power supply system is accomplished via a fiber optic interface. All high voltage safety interlocks are of a failsafe hardware based design. The FIB is CE marked and is designed to be compliant with applicable IEC, UL and SEMI standards. Consult factory for final configuration requirements.
Typical applications:
- Focused Ion Beam (FIB)
- Ion Gun Controller
Integrated Accelerator and Ion Source Chassis
- Integrated Accelerator and Ion Source Chassis
- High Performance Ground Reference Lens Chassis
- Very Low Ripple and Ultra Stable Outputs
- Robust Arc and Short Circuit Protection
- Design to Minimise Micro-discharge Events
- Optically Isolated Digital Interface
- CE Marked & Designed to Meet SEMI S2
Specifications
Input Voltage:
+24Vdc, ±5% @ 5.5 amps maximum. Inrush is <6 amps for 1 second.
Safety Fuse:
A 5 x 20mm ceramic fuse changeable from the outside and marked with the fuse value.
Power Switch:
A shielded rocker switch allows the unit to be switched ON and OFF from the rear panel.
Environmental:
Operating Temperature:
+10°C to +45°C ambient for normal operation. The unit will operate from 0°C but will require an extended warm up period.
Storage Temperature:
-20°C to +60°C
Humidity:
0 to 80% RH, non-condensing
Altitude:
2000 meters ASL at full power. For altitudes above 2000 meters the maximum ambient operating temperature is linearly derated by 1.1˚C per 300 meter interval.
Mechanical:
Main chassis (rack mountable): See dimension drawings
Lens chassis (rack mountable): See dimension drawings
Weight:
Main chassis: <66.12 lbs. (<30kg)
Lens chassis: <22.04 lbs. (<10kg)
Software:
All communications to the power supply is through a fiber optic link operating at 19.2 kbaud, or Ethernet. A basic self-test capability is provided. This self-test will verify internal consistency of the HVPS, including internal supply voltage levels, reference voltages, firmware integrity, etc. However, the HVPS will not change any output voltages during this test.
Regulatory Approvals:
IEC61010:2010 Safety requirements for electrical equipment for measurement, control and laboratory use. UL61010-1:2012
Safety Requirements for Electrical Equipment for Measurement, Control, and Laboratory Use - Part 1: General Requirements and CAN/CSA-C22.2 No.61010-1-12:2015. The unit is CE marked against EN61010:2010 and EN61326-2-1:2013 and is RoHS compliant.
ACCELERATOR SUPPLY
Output Voltage:
0 V to +35 kV, referenced to ground.
100V absolute accuracy
Output Current:
30μA maximum
Current Limit:
30μA maximum
Load Regulation:
±0.01% of maximum for 0-100% rated current change
Line Regulation:
100mV over input power range
Ripple:
200mV p-p, from 0.1Hz to1MHz at 30kV and 30μA
Temperature Coefficient:
25ppm/˚C
Stability:
1.5V/10 hours after 2 hour warm-up
Programming:
16 bit resolution, 0V to +35kV
Monitoring:
14 bit resolution, 0V to +35kV, ±1% accuracy (±50V offset)
14 bit resolution, 0μA to 30μA, ±1% accuracy (±0.3μA offset)
Response:
<1.0 second
F ILAMENT SUPPLY
Output Voltage:
0 to 5Vdc, referenced to Accelerator, current controlled
Output Current:
0 to 5 amp, 5mA absolute accuracy
Load Regulation:
±0.1% of maximum for 0 to maximum rated voltage change
Line Regulation:
5mA over input power range
Ripple:
10mA p-p, from 0.1Hz to 1MHz
Temperature Coefficient:
200 ppm/°C
Stability:
5 mA/10 minutes after 2 hour warm-up
Programming:
16 bit resolution, 0A to 5A
Monitoring:
16 bit resolution, 0V to 5V, ±4% accuracy (±0.1V offset)
16 bit resolution, 0A to 5A, ±4% accuracy (±50mA offset)
Response:
< 0.10 sec, >5A/s measured between 10% to 90% or 90% to 10%
SUPPRESSOR SUPPLY
Output Voltage:
-2 kV to +2kV, referenced to Accelerator, ±20V absolute accuracy
Output Current:
30μA
Current Limit:
30μA
Load Regulation:
±0.01% of maximum for 0 to maximum rated voltage change
Line Regulation:
100mV over input power range
Ripple:
150mV p-p, from 0.1Hz to 1MHz
Temperature Coefficient:
25 ppm/°C
Stability:
0.5 V/10 hours after 2 hour warm-up
Programming:
16 bit resolution, -2kV to +2kV
Monitoring:
14 bit resolution, -2kV to +2kV, ± 1% accuracy (±8V offset)
Response:
<0.25 sec
EXTRACTOR SUPPLY
Output Voltage:
0 to -15kV, referenced to Accelerator, 100V absolute accuracy
Output Current:
400μA
Current Limit:
programmable, 8 bit resolution, 0 μA to 400μA, (default value on supply enable is 400μA)
Load Regulation:
±0.01% of maximum for 0 to maximum rated voltage change
Line Regulation:
100 mV over input power range
Ripple:
100mV p-p, from 0.1Hz to 1MHz at 30μA and below
Temperature Coefficient:
25 ppm/°C
Stability:
0.5 V/10 hours after 2 hour warm-up
Programming:
16 bit resolution, 0V to -15kV
Monitoring:
16 bit resolution, 0V to -15kV, ±1% accuracy (±15V offset)
16 bit resolution, 0μA to 400μA:
10μA to 400μA, ±3% accuracy (±5μA offset)
0μA to 10μA, > 5kV, ±0.05μA accuracy (±0.05μA offset)
Response:
<1 sec
>1.33kV/s measured between 10% to 90% and 90% to 10%
Trips:
Hard trip at 400μA in <0.25 sec programmable trip delay (for when current at I limit). 0 sec to 255 sec, 8 bit resolution (5 sec minimum, 20 second default)
LENS 1 SUPPLY
Output Voltage:
0kV to +30 kV referenced to ground 100V absolute accuracy
Output Current:
30μA
Current Limit:
30μA
Load Regulation:
±0.01% of maximum for 0 to maximum rated current change
Line Regulation:
100mV over input power range
Ripple:
100mV p-p, from 0.1Hz to 1MHz
Temperature Coefficient:
25 ppm/°C
Stability:
1.0 V / 10 hours after 2 hour warm-up
Programming:
16 bit resolution, 0 to +30kV
Monitoring:
16 bit resolution, 0kV to +30kV, ± 1% accuracy (±30V offset)
16 bit resolution, 0μA to +30μA, ± 3% accuracy (±1μA offset)
Response:
<0.1 s
<4 sec to reach <2V away from steady state for 20kV to 18kV change.
<4 sec to reach <2V away from steady state for 18kV to 20kV change.
>6.0kV/s measured between 10% to 90% or 90% to 10%
Wobble Range:
2V to 2.5kV peak to peak, sinusoidal. If wobbling occurs near zero, the wobble waveform will be clipped so as to prevent crossing zero.
Wobble Period:
1 second to 4 seconds
LENS 2 SUPPLY
Output Voltage:
-30kV to +30kV referenced to ground 100V absolute accuracy
Polarity:
Bipolar
Output Current:
30μA
Current Limit:
30μA
Load Regulation:
±0.005% of maximum for 0 to maximum rated current change
Line Regulation:
100mV over input power range
Ripple:
200mV pk-pk, from 0.1Hz to 1MHz
Temperature Coefficient:
25 ppm/°C
Stability:
1.0V / 10 hours after 2 hour warm-up
Programming:
16 bit resolution, -30kV to +30kV
Monitoring:
14 bit resolution, -30kV to +30kV, ±1% accuracy (±15V offset)
14 bit resolution, -30μA to +30μA, ±3% accuracy (±1μA offset)
Response:
<0.1 s
<4 sec to reach <2V away from steady state for 20kV to 18kV change.
<4 sec to reach <2V away from steady state for 18kV to 20kV change.
Wobble Range:
2V to 2.5kV peak to peak, sinusoidal. If wobbling occurs near zero, the wobble waveform will be clipped so as to prevent crossing zero.
Wobble Period:
1 second to 4 seconds
Additional Bipolar:
The above specifications do not apply in the range -500V to +500V. Operation at 0V output is not a requirement. The module must enable at 0V output. Programming and monitoring is offset binary
Indicators:
Power On:
A green LED illuminates when 24Vdc is applied to the unit
Interlock:
A yellow LED illuminates when the interlock(s) are made
Interlocks:
If the interlock is not present communication over the optical bus will remain operational.
Output voltages will be <1000V in <30 seconds when the interlock opens. The interlock will deactivate the power supply via relay contacts and will not reactivate until the supply is enabled through the computer control, even though the interlock may close.
Panel removal: all outputs disabled
Upper column: All outputs except lens 2 disabled
Lens 2: Disable only the lens 2 output
The individual modules of the HVPS can be enabled and disabled through computer control, provided the appropriate hardware interlocks are enabled.
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