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Tucano Medium Size Plasma Reactor
Tucano is a bench-top plasma system, designed for surface cleaning, modification and activation. It can operate on different materials such as metals, plastic, ceramic, paper and others. Tucano consists in a plasma reactor capacitively coupled that comprises a cylindrical process chamber with a couple of planar and parallel electrodes inside, entirely made of aluminum and free of welds. The top electrode is RF biased while the lower electrode is grounded. Thanks to a suitable sample tray, the samples to be processed are manually loaded inside the process chamber. The user friendly graphical interface combined with the efficient RF system makes the Tucano an easy and versatile solution for small productions or R&D environments.
- Bench-top plasma system , easy and versatile
- Able to process up to ten different editable recipes
- Uniformity for Consistent Results
- Datalogging capabilities
- Long Term Reliability
- Primary brands components used, such as vacuum gauges and mass flow controllers (MKS Instruments)
- Adjustable RF power level in the range 1W to 200W
Tucano is fully automated by an advanced PLC with LCD colour touch screen display. The only manual handling to be carried out is the step of loading / unloading of the samples.
With this system it is possible to operate directly on the system components or let the PLC to carry out a process based on a recipe editable by the user.
One or more process gases are introduced into the process chamber by using mass flow controllers (MFCs). An RF signal (13.56 MHz) is led to the electrodes within the chamber; interacting with the gas molecules, this signal, produces the plasma.
The generated plasma provides reactive ionic species that act on the first monolayer of the substrate surface to be treated. The resulting process can be changed by the parameters that affect the state of plasma (gas flows and signal strength).
- Surface activation
- Surface cleaning
- Surface coating
- Etching