OAI
OAI - Model 311 - UV Intensity Analyzer with 9 Point Probe
FromOAI
Adjusting aligner optics is vital to precise, high yield wafer processing. OAI`s Model 311 Intensity Profiler combines superb human engineering and measurement accuracy expressly for that purpose. It employs a unique bar-graph display that presents a graphic portrayal of the percent deviation of each intensity level from a reference plane. The companion nine-sensor probe enables the user to continuously measure light intensity at nine points on the wafer plane.
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Perfect for a wide variety of industries where the precision measurement of UV energy is essential, the Model 311 is designed for any application requiring repeatable, reliable UV measurement.
- Speeds adjustment of aligner optics
- Measures both intensity and total energy
- Employs unique nine-column, LED bar-graph display
- Optimizes high-yield photolithography
- Serves contact/proximity aligners and other exposure sources
- Choice of probe tuned to desired spectral response