Time resolved plasma diagnostics for pulsed 2.45 GHz hydrogen discharges

A review of the last ten years of advances in temporal resolved plasma diagnostics for pulsed operated 2.45 GHz microwave-driven hydrogen discharges is presented. Special attention has been paid to the study of breakdown and decay processes where Hiden systems have been used showing relevant results.

Density and temperature measurements: Langmuir probe made of tungsten wire 6mmlong and 0.5 mm diameter is placed in the middle of the plasma chamber. The Langmuir probe driver consists of an ESPion system from Hiden Analytical Ltd. Jitter is carefully checked obtaining a value lower than 200 ns in order to ensure measurement stability. By modifying the Langmuir probe driver trigger delay, the time evolution of electron temperature and density is obtained and a pulse in temperature is clearly detected as in shown in Fig. 1