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Film Sense LLC products
Film Sense - In Situ Ellipsometer
Film Sense Multi-Wavelength Ellipsometers are ideal for in situ realtime monitoring and control of thin film deposition and etching processes. The ability to watch and characterize a process in realtime by in situ ellipsometry measurements can be extremely beneficial for diagnosing problems in a process chamber and improving the efficiency of process development.
Multi-Wavelength Ellipsometer
Film Sense - (Gen. 3) Ellipsometer
The 3rd generation Film Sense Multi-Wavelength Ellipsometer systems are now available! The primary improvement in this generation is the motorized source polarizer, which enables auto-calibration and zone-averaged measurements. The new systems offer the same benefits of the patented* FS-1 ellipsometer technology (long life LED light sources, fast and reliable no moving parts detector, compact design, and web browser software interface), while maintaining ease of use and affordability.
Film Sense - (Gen. 3) Ellipsometer
The 3rd generation Film Sense Multi-Wavelength Ellipsometer systems are now available! The primary improvement in this generation is the motorized source polarizer, which enables auto-calibration and zone-averaged measurements. The new systems offer the same benefits of the patented* FS-1 ellipsometer technology (long life LED light sources, fast and reliable no moving parts detector, compact design, and web browser software interface), while maintaining ease of use and affordability.