Gencoa Ltd. products

Gencoa full face erosion (FFE) magnetics combine ultra-uniform films with clean target erosion by a scanning of the plasma over the target surface. Two versions of the circular FFE are available, with a unique design for target diameters of 75mm-200mm (3" to 8") which includes options of internal and external mount, and is ideally suited to R&D and optics. For larger substrates, Gencoa offer the circular FFE in target diameters of 250mm (10") and above, delivering superior uniformity control at low target-to-substrate separations – typically 50-70mm. This low target-to-substrate separation ensures a high rate of material transfer from the target to the substrate for rapid wafer metallizing.

Gencoa`s IMC75 is a gridless and self-neutralizing circular ion source, and marks a new generation in ion etching. The IMC75 boasts a long maintainance cycle - both in reactive and inert environments - and has an operational range of up to 90mA and up to 3kV. There is no contamination, which makes the product suitable for semi conductor applications. Other applications include substrate pre-clean, ion assist, etch/texturing and PACVD deposition. The IMC75 is easy to fit, with a 1" shaft mount and outer diameter of 5", and is an ideal pair for Gencoa`s new 3" and 4" circular full face erosion magnetrons.