Gencoa Ltd. products

Gencoa full face erosion (FFE) magnetics combine ultra-uniform films with clean target erosion by a scanning of the plasma over the target surface. Two versions of the circular FFE are available, with a unique design for target diameters of 75mm-200mm (3" to 8") which includes options of internal and external mount, and is ideally suited to R&D and optics. For larger substrates, Gencoa offer the circular FFE in target diameters of 250mm (10") and above, delivering superior uniformity control at low target-to-substrate separations – typically 50-70mm. This low target-to-substrate separation ensures a high rate of material transfer from the target to the substrate for rapid wafer metallizing.