SparkNano products

Market Leading Large Area Fab Solution for Flat Samples

Vellum is tailored designed for sheet to sheet (S2S) applications for deposition on substrates ranging from 0,5 x 0,5m up to 1 x 1.5 m. Substrates like metal or polymer foils, wafers, glass and porous substrates. All aimed at real production throughput up to 20 substrates per minute. In combination with a large variety of deposition materials and deposition temperatures. The substrate flow handling and inline integrated set-up of the system will be in designed as the overall set-up requires. The Vellum product line is a fully automatic processing platform for high throughput.

Proven Roll-To-Roll (R2R) System

Proven roll-to-roll (R2R) system for ultra-high-volume Spatial ALD production on flexible foils. The optimized design enables ultrafast deposition onto flexible substrates, such as polymer or metal foils. The system can be configured for thermal or plasma enhanced Spatial ALD to match the desired material to be deposited. The web width, web speed and deposition materials will be ready to be adopted according to the overall customer application. The standard web-with is ranging from 300 to 2000 mm and a web speed up to 60 m/min. SparkNano uses proven technology used for other high throughput energy applications. Additionally, we offer optional integrational designs for line integration and for example interleafs.

Spatial Ald Technology

Highly reduced use of scarce materials while maintaining excellent performance. The quest for a sustainable planet: At SparkNano, we believe that our Spatial Atomic Layer Deposition (ALD) technology can support the quest for a sustainable planet and the development of better, cheaper and higher-performing materials for the hydrogen, battery, fuel cell, display and solar markets. The next-generation energy- and display devices: By commercializing the Spatial ALD technology, we provide state-of-the-art lab and fab equipment for our customers to design and mass-produce the next-generation energy- and display devices with a highly reduced use of scarce materials while maintaining excellent performance.

Labline Series

LabLine 6

Technical features: flat substrates like polymer and metal foils, wafers, glass and porous substrates. Substrate size: A free envelope of 175 mm x 215 mm x 5 mm is available. In this volume any flat substrate can be placed with a substrate specific holder. Process: Both thermal and plasma enhanced s-ALD

LabLine 12

Technical features: Substrate types flat substrates like polymer and metal foils, wafers, glass and porous substrates. Substrate size: A free envelope of 320 mm x 360 mm x 5 mm is available. In this volume any flat substrate can be placed with a substrate specific holder. Process: Both thermal and plasma enhanced s-ALD