Model Vellum Series -Market Leading Large Area Fab Solution for Flat Samples
Vellum is tailored designed for sheet to sheet (S2S) applications for deposition on substrates ranging from 0,5 x 0,5m up to 1 x 1.5 m. Substrates like metal or polymer foils, wafers, glass and porous substrates. All aimed at real production throughput up to 20 substrates per minute. In combination with a large variety of deposition materials and deposition temperatures. The substrate flow handling and inline integrated set-up of the system will be in designed as the overall set-up requires. The Vellum product line is a fully automatic processing platform for high throughput.
Substrate types
flat substrates like polymer and metal foils, wafers, glass and porous substrates
Substrate size
0,5x0,5 to 1,0x1,5m
Process
Both thermal as plasma enhanced s-ALD
