SVCS Process Innovation s.r.o.

SVCS Process Innovation designs and manufactures batch horizontal and vertical diffusion, PECVD and LPCVD furnaces for the semiconductor and photovoltaic industries, or related R&D institutes. Other products include various gas source systems like gas cabinets, valve manifold boxes and custom equipment gas manifolds. The heart of all SVCS tools is in-house designed control system that is often used for refurbishment of third party equipment. This proprietary control system can be used both for a new or refurbished equipment Other products include various UHP gas systems like source gas cabinets, valve manifold boxes, gas sticks and various equipment gas systems. SVCS experience is based on a long history of the semi- conductor industry in former Czechoslovakia. Besides the domestic market, the installation base, supported by SVCS local offices and distributors, include China, Taiwan, Russia, India, Korea, Malaysia, Turkey and other European countries.