SVCS Process Innovation s.r.o. products

SVCS brings many year experience with quality inherent in semiconductor industry to solar cell production. SV SOL family of equipment includes horizontal batch diffusion furnace for phosphorus or boron doping/diffusion, PECVD or LPCVD horizontal batch furnace for antireflective coating and passivation, ultra high purity gas and liquid delivery systems for both full production and R&D/pilot environments.

The EBS (Ex-Torch) is a diffusion furnace accessory used for pyrogenic oxidation processes. It generates high purity water vapor by burning Hydrogen in Oxygen. This burning is made in an external quartz chamber so the process tube working zone is not affected by hydrogen flame. Heating to Hydrogen self ignition temperature is achieved with electrical resistance heater.