1 products found
Tokyo Electron Limited (TEL) Products
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Etch System - Tactras Series
Tactras™ series is the latest etch system from TEL. It is capable of continuous vacuum transfer of 300mm wafers and can support up to 6 process chambers with the option to add post process chambers. Tactras™ achieves the world`s highest level of wafer transfer speed and footprint. It has been adopted by many customers and continues to evolve since its launch in 2006.
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Tactras Vigus - Model 300mm - Plasma Etch System
Tactras™ Vigus™ is a highly reliable 300mm plasma etch system that enhances etch process productivity. Scaling at advanced technology nodes makes the etch process more and more crucial. As the solution for etch process challenges, Tactras™ Vigus™ provides customized options for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL dielectric ...