ULVAC GmbH products

The ULGLAZE Series are Expanding Thermal Plasma CVD (ETP-CVD) systems for deposition of scratch and abrasion resistant coatings onto polycarbonate using monomer and O2 reagents.

Enviro Optima - The Resist Strip System with the Highest Throughput, in the Smallest Footprint, with the Lowest Cost.

Batch type equipment of chemical dry cleaning for remoral of native oxide in Narrow and Deep-contact patterns of advanced semiconductor.

This tool, SOPHI-400, basically inherits exisiting medium current production model ion implanter, and remove over specification based on our sufficient experience as tool supplier. Therefore, thanks to effective cost reduction, we can offer inexpensive sales price with parallel scan capability.

SiC power device recently became a key technology to realize a ‚low-carbon society‘. The Oxidation/Nitridization/Annealing system Ailesic 2000 from our partner Toyoko Kagaku is our solution to assure you improved performance of the SiC thermal processes and a stable mass production in the Activation Anneal Process.

FHV series are used for various purposes such as quenching, tempering and brazing of various metals. Vertical two-chamber configuration which consists of heating chamber + preparation/cooling contributes to space saving by adopting elevation mechanism. Temperature data from heating process to cooling process can be seamlessly recorded for quality control of products.