SVCS - Ultra High Purity Liquid Delivery Systems - Brochure

Many modern reaction constituents for semiconductor and PV processes are available only in liquid phase. Suitable delivery systems have been adopted to make them usable for technology process. One of the method is based on liquid vapor pick up by flowing gaseous media through the liquid. Flow of such carrier gas is controled by eletronic MFCs and is introduced to liquid container through a dip tube while a carrier vapor mixture leaves the container through separate top outlet.  In order to maintain the same pick up rate during the whole process and from process to process, liquid media temperature has to be precisely and accurately controlled. A proprietary powerful combined heating/cooling engine for dry bath environment has been developed for this purpose.