Betelex Energy Equipment & Supplies

1 equipment items found

Betelex - FPD Etch/Ash System

Manufactured by:Tokyo Electron Limited (TEL) based inTokyo, JAPAN

Today, to manufacture high-resolution and high-performance displays, the TFT process must become more complex, and higher productivity is required for plasma etch systems. Betelex™ supports up to 5 process chambers and realize significantly higher productivity with smaller footprint and facility cost. Betelex™ can also combine multi-process steps in separated chambers and contribute a ...

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