Therma Probe Energy Equipment & Supplies

1 equipment items found

Therma-Probe - Model 680XP - Ion Implant/Anneal Metrology System

Manufactured by:Metrosemi based inSanta Clara, CALIFORNIA (USA)

The Therma-Probe 680XP ion implant/anneal metrology system enables inline dose monitoring for the 2Xnm/1Xnm design nodes. The Therma-Probe 680XP produces critical process information about ion implant dose and profile, implant and anneal uniformity and end of range damage. In addition, the Therma-Probe 680XP system’s high resolution micro uniformity maps provide fingerprinting capability ...

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