Microcertec SAS

MicrocertecChucks and Wafer End-Effectors for Semiconductor

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Chucks and end-effectors are used to manipulate and carry silicon wafers through the whole production process. The chemical inertness of ceramics allows those components to be contamination-free for the wafer in particular in chemical wet etching baths.
These items enable the handling of large-size wafers and can be designed with vacuum channels in order to hold the part.

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Ceramic components can be used in the following semiconductor process equipment :

  • Deposition and ion implant machines
  • Chemical wet etching equipment
  • Failure-analysis machines
  • Electrostatic chucks

The most commonly used ceramic materials are :

  • Alumina – or aluminium oxide – 99,6 % minimum
  • Sintered and CVC silicon carbide.