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Cleansorb - Model Fabline -Waste Gas Removal System
FABLINE is the standard CLEANSORB model for waste gas removal on factory-scale applications. Available in three column sizes, the system is readily adaptable to the requirements of both pilot line and full-scale manufacturing. Enabled by the built-in safety and efficiency of CS CLEAN SOLUTIONS proprietary CLEANSORB® media, and with several thousand installations worldwide, FABLINE is the model of choice for a wide range of process applications including: Plasma Etching, CVD, ALD, Ion Implantation and CIGS Photovoltaics.
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- Passive operating principle, does not require electricity, heating, fuel or water
- Built from corrosion-resistant 316L stainless steel and high quality, trustworthy components
- Automated routines for pressure-hold testing and inert gas purging simplify column-change
- Wide range of configurations and options, including integrated blower
- Available as SEMI-S2 compliant version with redundant safety features
