Beneq Transform - Model 300 -Cluster Tool Semiconductor
Beneq Transform 300 is a highly versatile manufacturing platform intended for IDMs and foundries dedicated to CIS, Power, Micro-OLED/LED, Advanced Packaging and other MtM applications. It is a highly configurable solution that caters to multiple advanced thin-film applications ranging from gate dielectric to passivation and/or encapsulation and beyond.
VERSATILITY
Maximum flexbility and capability. The Beneq Transform® 300 is the only 300mm ALD cluster tool offering both Thermal ALD (batch) and Plasma ALD (single wafer) technologies.
CONFIGURABLE
Find the right set up for you. The Transform® 300 platform is designed to meet a wide range of capacity and applications requirements including advanced packaging, chip scale package and wafer-on-tape applications.
PRODUCTIVITY
The top tier of industry standards. This tool includes best-in-class serviceability and the shortest MTTCR available. With our proprietary pre-heating module, enjoy some of the highest throughput for thermal batch ALD.
FAB-READY
Beneq Transform® 300 is cleanroom compatible with SECS/GEM communication capabilities and is compliant with the highest SEMI S2 and S8 standards.
- fast sampling
- sample size up to 200 mm
- full-automatic coating process
- dual independent material feeds
- safety enclosure
Why choose Beneq ACS 200:
- Uniformity and quality matching spin coating with built-in industrial scalability
- Quality exceeding conventional spray coating methods
- High reliability due to industrial key components
- Broad chemical compatibility
- Small particle deposition
- Non-contact process enables coating of structured or slightly curved substrates