Navio - Digital Configurable Matching System

• Plug-and-play installation with Advanced Energy’s RF power supplies for thin film applications
• Efficient and stable power delivery
• Compact and air-cooled (standard package or slim version)

Experience simplicity and high reliability in a single, affordable package. The Navio™ matching network leverages our power expertise to precisely match complex plasma impedance to your tuning range. It’s quick, accurate, and repeatable. Available in multiple power ranges and frequencies, choose from a standard offering or a configurable design. Installation is virtually plug-and-play with Advanced Energy’s RF power supplies. Virtual Front Panel software is available for monitoring.

• Improve throughput, increase yield, and reduce production costs
• Choose a standard model or configure a unit that meets your system requirements
• Install and operate with ease
• Obtain excellent repeatability for high process yield

• Quick, accurate, and repeatable impedance matching
• Optimized, off-the-shelf functionality for many applications
• Generous menu of configuration options for more sophisticated processes
• Wide power and frequency ranges
• Compact air-cooled unit available in a standard or slim version