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Film Sense - Model FS-1 - (Gen. 3) Ellipsometer
FromFilm Sense LLC
The 3rd generation Film Sense Multi-Wavelength Ellipsometer systems are now available! The primary improvement in this generation is the motorized source polarizer, which enables auto-calibration and zone-averaged measurements. The new systems offer the same benefits of the patented* FS-1 ellipsometer technology (long life LED light sources, fast and reliable no moving parts detector, compact design, and web browser software interface), while maintaining ease of use and affordability.
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- Compact optics: Source 142 x 80 x 60 mm, Detector 110 x 80 x 60 mm
- Simple connections: +5V wall plug power supply, Ethernet, and Source-Detector link cables
- Motorized Source Polarizer:
- provides automated instrument calibration
- enables zone-averaged measurements, for improved measurement accuracy
- 4x more intensity (compared to original FS-1), and updated detector electronics provide improved measurement precision: 2x for ex situ, 4x for in situ
- 65° Angle of Incidence.
- Manual sample loading and height adjustment.
- Sample sizes up to 200 mm dia. and 20 mm in thickness.
- Sample tilt with +/-2° range.
- Beam size on sample: 4 x 9 mm.
- Compact footprint (180 x 400 mm) and light (5 kg).
- 4 wavelengths, 450 – 660 nm spectral range (replaces the original FS-1)
- Excellent choice for measuring single layer transparent films in the 0 – 2 μm thickness range, with precision down to 0.0004 nm