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Film Sense LLC
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  5. Film Sense - Model FS-1EX - (Gen. 3) ...

Film Sense - Model FS-1EX - (Gen. 3) Ellipsometer

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The 3rd generation Film Sense Multi-Wavelength Ellipsometer systems are now available! The primary improvement in this generation is the motorized source polarizer, which enables auto-calibration and zone-averaged measurements. The new systems offer the same benefits of the patented* FS-1 ellipsometer technology (long life LED light sources, fast and reliable no moving parts detector, compact design, and web browser software interface), while maintaining ease of use and affordability.

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  • Compact optics: Source 142 x 80 x 60 mm, Detector 110 x 80 x 60 mm
  • Simple connections: +5V wall plug power supply, Ethernet, and Source-Detector link cables
  • Motorized Source Polarizer:
    • provides automated instrument calibration
    • enables zone-averaged measurements, for improved measurement accuracy
  • 4x more intensity (compared to original FS-1), and updated detector electronics provide improved measurement precision: 2x for ex situ, 4x for in situ
  • 65° Angle of Incidence.
  • Manual sample loading and height adjustment.
  • Sample sizes up to 200 mm dia. and 20 mm in thickness.
  • Sample tilt with +/-2° range.
  • Beam size on sample: 4 x 9 mm.
  • Compact footprint (180 x 400 mm) and light (5 kg).
  • 6 wavelengths, 405 – 950 nm spectral range
  • The 2 longer wavelengths (850 and 950 nm) enable the measurement of thicker transparent films (up to 5 μm), and absorbing semiconductor films (such as poly-Si, SiGe, amorphous-Si, etc.)
  • Film resistivity measurements (using the Drude model) are also improved with the 2 longer wavelengths.
  • 6 wavelengths and wider spectral range provide enhanced measurement capability for multilayer film stacks