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J. Schneider Elektrotechnik GmbH
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  5. J. Schneider Plasmatec - Switch-Mode DC ...

J. Schneider Plasmatec - Switch-Mode DC Power Supply for PVD

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Optimized for defect-free processing for state of the art thin film technologies. Compact design: up to 20 kW in 3 HU. Water-cooled. Arc management configurable. Micro arc suppression. Art.-no. : PLASMATEC DC***.

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The PLASMATECDC is a switch-mode DC power supply for PVD. Due to the CFC (Current Fed Converter) technology the output is a true current source, the most sophisticated solution for defect-free plasma processing. The device delivers DC output current / voltage. It is available with 5, 1O or 2O kW. In parallel mode the power can increase up to 200 kW. Digital regulation of current, voltage and power reaches most accurate values. The PLASMATEC DC provides high power density and great robustness, extremely low stored output energy and a sophisticated, flexible, adjustable arc management.

  • Connection in parallel: up to 10 units
  • Synchronization: up to 20 units
  • Interfaces:
    • I/O interface / RS232 interface
    • More interfaces as option possible
  • Dimensions (H x W x D)
    • 133.35 x 482.6 x 600 (725 inklusive Stecker) mm
    • 3HU x 19” x 600 mm