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Singular Process Heating Equipment & Supplies
1 equipment items found
Manufactured by:Singulus Technologies AG based inKahl, GERMANY
SINGULAR ICP-PECVD is a fully automated innovative and modular PECVD coating tool for R&D and pilot production of crystalline silicon solar cells. The SINGULAR system is being applied for the development of passivation layers for high-ef ciency solar cells following conventional and new cell concepts, e.g. heterojunction solar cells. Thereby, the coating system meets the demands for both ...