Navigator - Model II FCi - RF Match Networks
From Plasma Power Generators - RF Match Networks
Agile, Precise Power Delivery for Demanding High-Speed Matching Applications. Advanced Energy's Navigator II FCi enables improved process control with precise power delivery and tuning. The high-speed matching network is optimized for critical, power sensitive, short duration plasma process steps. Conventional longer steps and wide tuning range, traditionally handled by vacuum capacitor-based matching networks, are also supported. Through high-speed tuning, the Navigator II FCi offers many process control enhancements.
-
Most popular related searches
Reduced plasma stabilization time
- Reduced plasma stabilization time
- No plasma dropout between process recipe transitions
The Navigator® II FCi is a standalone, microprocessor-controlled impedance matching network. Incorporating tuning elements adjusted by discrete solid-state switched capacitor arrays, the matching network is driven by the need to achieve fast, accurate tuning across wider impedances. With a similar form, footprint, and tuning ranges as traditional counterparts, these matches offer tuning times in the millisecond range compared with the one-second range typical of traditional matching networks. This high-speed matching technology is optimized and suited for critical, power sensitive, short duration plasma process steps such as Atomic Layer Etch (ALE).
When configured for full-range tuning, the Navigator FCi can cover an impedance space identical to that of a vacuum capacitor match. The compactness of solid-state circuitry allows the match to fit within a similar footprint of the conventional version. This match has no moving mechanical parts, eliminating wear and drift mechanisms inherent to traditional matches. This enables higher reliability and repeatability on a broad range of challenging and continually varying plasma processes.
Benefits
- Achieve fast, accurate tuning across a wide impedance range
- Improve reliability and repeatability
- Reduce power delivery interruption and “winking-out” of plasma
- Utilize technology for short process steps, such as ALE applications
Features
- 13.56 MHz
- CW and pulse operation
- Output measurement sensor
- Air cooled
Customer reviews
No reviews were found for Navigator - Model II FCi - RF Match Networks. Be the first to review!