Navio - Digital Configurable Matching System
Economical, Digital, Configurable Matching Network Solution. The Navio matching network delivers quick, accurate, and repeatable impedance across many applications.
- Plug-and-play installation with Advanced Energy’s RF power supplies for thin film applications
- Efficient and stable power delivery
- Compact and air-cooled (standard package or slim version)
Experience simplicity and high reliability in a single, affordable package. The Navio™ matching network leverages our power expertise to precisely match complex plasma impedance to your tuning range. It’s quick, accurate, and repeatable. Available in multiple power ranges and frequencies, choose from a standard offering or a configurable design. Installation is virtually plug-and-play with Advanced Energy’s RF power supplies. Virtual Front Panel software is available for monitoring.
- Improve throughput, increase yield, and reduce production costs
- Choose a standard model or configure a unit that meets your system requirements
- Install and operate with ease
- Obtain excellent repeatability for high process yield
- Quick, accurate, and repeatable impedance matching
- Optimized, off-the-shelf functionality for many applications
- Generous menu of configuration options for more sophisticated processes
- Wide power and frequency ranges
- Compact air-cooled unit available in a standard or slim version