Therm-x - Pedestal Heaters Plates
Therm-x manufactures brazed heater plates for the semiconductor industry. Use of multiple Mineral insulated heating elements allows for better uniformity and multi-zoning for applications where uniformity can’t be met with traditional single zone tubular heaters.
Vacuum Brazed Heater Pedestal for the Semiconductor industry
- Single or Multi Zone
- Embedded Sensors
- 550°C Operating temperature
- Sapphire or ceramic lift pins
- Aluminum
- Stainless Steel
- Ceramic
- Copper
- Pyralloy (TPG) option for high uniformity
- Thermal Imaging
- Performance test
- High Isolation Resistance
Therm-x Manufactures the Following Semiconductor Products
- Cast in Heaters for Semiconductor Processing
- Custom Wafer Process Heaters & Heating Elements
- Semiconductor Heaters
- Semiconductor Wafer Vacuum Heaters
- Wafer & Gas Line Heaters
- Wafer Handling Solutions
- Water Heaters & Semiconductor Chamber Pedestal Heaters
- Wafer Processing Heaters
- HEATER PLATE STANDARD OPTION 1: SIZE
- STANDARD OPTION 2: HEATING ELEMENT AND SENSING ELEMENT
- STANDARD OPTION 3: MATERIAL SELECTION
- STANDARD OPTION 4: TERMINATION
- SPECIAL OPTIONS
- INQUIRY PART NUMBER
- THERM-X EXTENDED CAPABILITY FOR HEATER
- VACUUM TEST CHAMBER
Uniform heat distribution is difficult to achieve at high temperatures using traditional heaters. As an industry leader in advanced temperature and process control systems for hi-tech industries, we have helped clients overcome heat distribution issues by providing them PyrAlloy heater plates. Manufactured from PyrAlloy, a thermal pyrolytic graphite (TPG), these heater plates are proven to perform at high operating temperatures.