Pinnacle - Model 3000 - DC Power System in a 3000 W Package
From Plasma Power Generators - DC Power Systems
Robust, compact DC generator designed exclusively for low power applications where precision and process repeatability are critical.
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Overview
- Enables superior film quality with less than 6 mJ/kW delivered arc energy
- Run-to-run consistency: Better than 0.1% repeatability
- Wide process range — impedances from 370 to 1000 VDC
The Advanced Energy Pinnacle 3000 DC power supply provides extremely high efficiency and power factor, which results in low operating and install costs. Pinnacle process consistency and control significantly reduce variation and enable higher yields in both process and bias applications.
Benefits
- Proven Pinnacle performance and reliability
- Versatile — excellent in both process and bias applications
- Fast, configurable arc response — low arc damage
- Precise process control
Features
- Extremely high efficiency and power factor
- Compact — 3000 W in a 2U, ½-rack package
- Wide, single tap
- Profibus and RS-232 serial communications 400 VAC input only
- Low stored energy — less than 6 mJ per 1 kW of output
- Output repeatability of ±0.1% at greater than 15% power
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