Therma-Probe - Model 680XP -Ion Implant/Anneal Metrology System

The Therma-Probe® 680xp ion implant/anneal metrology system enables inline dose monitoring for the 2Xnm/1Xnm design nodes. The Therma-Probe 680xp produces critical process information about ion implant dose and profile, implant and anneal uniformity and end of range damage. In addition, the Therma-Probe 680xp system’s high resolution micro uniformity maps provide fingerprinting capability for implant and anneal process development.

Template Application

• Peel back the release film at the top.
• Align the template with the glass panel.
• One side of the film has an adhesive coated surface that clings to the surface of the panel, but can be easily peeled up and moved for proper alignment.
• When properly aligned, smooth out the template as contact is made between the two surfaces.

Sensor Bonding

• Peel back the small tab over each sensor, lifting the chip.
• Apply the bonding material to each chip and press it back in place against the glass.
• The bonding material will harden in only 30 minutes, and completely cure in about four hours. No heat is required during the curing process.

Temporal Removal

• Once cured, remove the template by gently peeling it away from the glass, leaving the chips in place. No residue is left from the adhesive material.
• Your instrumented glass panel is ready to start measuring.