XP-Power - Model CB Series - Radio Frequency (RF) Power System
From RF Power Systems - Rack Mount Generators
The CB series is the culmination of 45 years of RF plasma and heating experience. We have taken the proven rugged design of the CX series power amplifier section and combined it with all the innovation in DC supplies and diagnostics to make a compact, stable RF power supply without compromising reliability for size. These single frequency RF power supplies operate in the HF/VHF band (13.56MHz to 60MHz) still benefiting from XP Power’s “S” technology.
Performance
RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on XP Power's proven RF amplifier technology.
Features
- Small, lightweight packaging
- Standard fixed frequencies: 13.56 MHz to 60 MHz
- Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
- Designed to meet CE, EN61010, SEMI F47, EN55011, EN61326, EN61000, FCC part 18
- Forward or Delivered power mode regulation
Application
The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, ICP, RF sputtering and PECVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.
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