semiconductor wafer | Energy XPRT

Equipment & Solutions

  • Semiconductor Wafer-Chuck Handling Systems
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    Semiconductor Wafer-Chuck Handling Systems

    Wafer Positioning / Rotating Our wafer handling systems use ultrasound-air-bearing and can be applied in any atmospheric process. The ultrasound air bearing generates a supporting gas film (air or process-gas) between surfaces and substrates. Wafers hover, friction-free, on a supporting gas film at a height of 100 µm, therefore 4 side-stop-pins (2 are movable) are required to afix the wafer ...