- Home
- Companies
- Hiden Analytical Ltd.
- Articles
- TIPS: Test-Bench for Ion Source Plasma ...
TIPS: Test-Bench for Ion Source Plasma Studies
Courtesy of Hiden Analytical Ltd.
TIPS (Test-bench for Ion Source Plasma Studies) is a 2.45 GHz Hydrogen Electron Cyclotron Resonance (ECR) plasma generator designed to be used as a flexible device to study the relationship between the engineering design of the source and the physical parameters of the generated plasma [1-5]. In many occasions, ECR plasma generators are used in ion sources for multiple applications both in scientific and industrial developments. The characteristics of the beam that can be extracted from the source are deeply related to those of the plasma and, for this reason, the understanding of the plasma parameters is a key point to design better and more reliable ion sources.
One of the most interesting parameters of plasma from the scientific point of view is the energy distribution associated to the different ion populations present in it: The Ion Energy Distribution Functions (IEDFs). The IEDFs are of interest for several reasons, e.g., to understand the ion dynamics within the discharge, compare the rates of certain plasma chemical reactions especially in discharges consisting of molecular species, and to predict the thermal properties of the extracted ion beams.
-
Most popular related searches
Customer comments
No comments were found for TIPS: Test-Bench for Ion Source Plasma Studies. Be the first to comment!