Litmas - Model RPS - Remote Plasma Source and Power Delivery System

• Small-footprint point-of-use abatement solution
• Highly reliable, effective abatement with minimum utilities usage
• Lower cost of ownership than competitive solutions

The Litmas^® Remote Plasma Source (RPS) system delivers high concentrations of reactive gas species to enable advanced fluorinated gas abatement. Its small-footprint, high-performance, ease-of-use, and low-cost-of-ownership solutions make it a wise choice for new installations or retrofitting existing systems for abatement.

• Generates high reactive specie fluxes, delivering higher destruction efficiency
• Etch gas abatement solution that meets regulatory or green initiative goals
• Increases pump lifetime by reducing particulates from deposition processes
• Provides fast matching, stable power delivery for precise process control
• Comprises one small-footprint package, easy to install in existing or new production locations

• Eliminates greenhouse gas emissions
• Provides the highest available plasma power density
• Uses durable SiO2 or Al2O3 chamber materials
• Uses patented LitmasMatch™ solid-state power-delivery topology
• Integrates the power supply, match, and plasma chamber in one package