SINGULAR - Model XP - Fully Automated Innovative Modular
From Thin Film Deposition
SINGULAR ICP-PECVD is a fully automated innovative and modular PECVD coating tool for R&D and pilot production of crystalline silicon solar cells. The SINGULAR system is being applied for the development of passivation layers for high-ef ciency solar cells following conventional and new cell concepts, e.g. heterojunction solar cells. Thereby, the coating system meets the demands for both current and future PV cell development.
Details
The SINGULAR system provides an automation module and a coating module. The coating module consists of several customizable vacuum chambers.
The innovative SINGULAR tool is based on static inline production which combines the advantages of inline substrate transport and static processing. It allows the coating of complex layers, such as layer stacks of different materials e. g. AlOx/SiNy. The key feature of the tool is the ICP-PECVD technology.
The inductively coupled plasma (ICP) excitation allows ideal control of film properties for various materials such as SiNx, AlOx, SiOxNy at high deposition rates. The process variability, the small tool footprint in combination with an excellent total ”Cost Of Ownership“ makes SINGULAR ideally suitable for upgrades of existing production lines.
SINGULAR allows developing new manufacturing processes for cell efficiencies above 20 % on proven production platforms.
Therewith, SINGULUS makes a valuable contribution to continuous improvements with respect to efficiency and manufacturing cost of PV modules, being a necessity to reduce the costs and enable the large-scale deployment of PV electricity.
SINGULAR – Facts
- Industrial proven multi-chamber ICP-PECVD coating tool
- Lowest cost of ownership
- Modular design for various processes (e. g. SiNx, SiOxNy, AlOx, a-Si ...)
- Single- and multi-layer capability
- Double-side coating capability
- Small footprint
- Integrated electrical and gas cabinets
- Efficient use of raw materials like electrical power, process gases ...
- Low noise level (no grey room necessary)
- High uptime
- Easy to operate
- Easy to maintain
- Inline cleaning processes available (e. g. for a-Si)
- Customized tool configuration, e. g. usage of special gases e. g. TMB, phosphine, organic precursors like TMAl
- Integrated automation solution
- Inline and cluster operation possible
- All types of automation cassettes suitable
Main Characteristics
SINGULAR
Inline Setup
The SINGULAR series is equipped with an inline automation module. Wafers can be loaded directly from the prior system (e. g. SINGULUS STANGL SOLAR Linea PSG EE) onto a conveyor and after processing directly to a printer line. Therefore the wafers are taken and stored on an incoming or outgoing conveyor belt. The prior and the following automation load and unload the wafers from the conveyor belt.
SINGULAR XP
Cluster Setup
The SINGULAR XP series is equipped with an integrated automation unit, which allows loading automation carriers into the system. After processing the wafers are also stored into an automation carrier. The SINGULAR XP is executed with two magazine conveyor stations. Each station can store up to 5 filled and 5 empty automation carriers (magazine). The wafers are unloaded from this magazine and stored after processing back into a magazine. Typical magazines and automation cassettes are available.
SINGULAR Platform Technology
SINGULAR is a fully automated coating tool designed for the mass production of silicon solar cells. It consists of one coating module with up to five independent vacuum process stations. This modular design makes it possible to adapt the tool setup individually to process demands and cell concepts. The SINGULAR platform is equipped with a single load lock. The load lock meets two functions, first bringing the uncoated wafers from ambient air environment into a high vacuum chamber with a base pressure below 10-5 mbar and second ejecting the coated wafers from the system. Inside the main vacuum chamber, the wafers follow an in-line setup throughout every process station (PS1-PS5). Each process station can be equipped with different processes, like IR heating or ICP-PECVD.
New Cell Processes with SINGULAR XP for High-efficiency Cells
The SINGULAR XP platform is applied at research centers and institutes in Europe, North America and Asia in different configurations. The involved R&D teams take advantage of the flexibility of the SINGULAR to perform industry orientated R&D as well as to advanced application orientated basic research to further improve the efficiency of solar energy conversion. Current major topics are rear side passivated cells (PERC type) and heterojunction cells. The target is to develop a sustainable energy supply based on solar resources.
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