Tempress - POCl3 High Density Diffusion System

Tempress has developed an alternative atmospheric process called High Density POCl₃. The HD system benefits from the throughput advantage of small pitch, back-to-back, and long flatzone. Using improved chemistry and hardware adaptions, excellent uniformity and efficiencies are obtained at Tier one customers. With the HD-POCl₃ diffusion process, Tempress has focused on process innovation to increase throughput without the drawbacks (high cost / high maintenance) of complex low pressure systems. The HD-POCl₃ process is supplied within Tempress’ improved 5-stack system platform.