Von-Ardenne - Model XEA|NOVA - Wafer Coating System
From Coating Equipment
TheXEA|novais an inline wafer coating system with a carrier return transport. It is specifically designed for high-efficiency solar applications such as TCO and metal layers for heterojunction solar cells (HJT). However, it is also suited for other small substrates.
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Product Details
With this tool, even very thin substrates can be treated on both sides without breaking the vacuum or flipping the substrates. These outstanding features of the XEA|novaenable sequenced but also simultaneous treatments of both substrate surfaces.
The XEA|nova can be equipped with rotatable magnetrons for sputtering and with various evaporation sources, such as electron beam guns. Special pretreatment of the substrates like cleaning or etching can either take place under vacuum or before the substrate enters the vacuum.
TheXEA|nova L is an inline coating system based on our proprietary large-area coating technology. The system is wider than the XEA|nova and can process more substrates at the same time. Therefore, it is especially suited for high productivity applications at very low costs.
Overview
- Applications: fuel cells, photovoltaics
- Substrate shape: flat/rigid
- Substrate material: glass, metals, polymer, stainless steel, wafers
- Coating Technology: electron beam technology, magnetron sputtering down, magnetron sputtering up
- Function: anti-reflection, contact, corrosion protection, passivation, TCO
- Layers & Layer stacks: Ag, Al, AlOx, AZO, C, Co, Cr, Cu, ITiO, ITO, Ni, NiV, SiN, SiOx, Ti, TiOx, Zn
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