plasma process Articles
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Micro and nano structuring and texturing of polymers using plasma processes: potential manufacturing applications
We review our recent work on the deterministic (top down) micro/nano structuring and stochastic (random) micro/nano texturing of polymeric materials for a variety of applications. We create polymeric microfludics/microsystems using plasma processing as well as 'smart' polymer surfaces with controlled wetting and optical properties. First, fabrication of polymeric micro-nanosystems and ...
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A Si–based bulk FinFET by novel etching process with mask–less and photoresist–free lithography technique
In this study, we used maskless and photoresist–free nano injection lithography (NIL) to develop a sub–10 nm fin width for a Si–based fin field–effect transistor (FinFET) with a 50–nm fin pitch. The active layer was fabricated using double alignment technology (electron–beam lithography and NIL), and the fin trench was filled perfectly by using a high–density plasma chemical vapour deposition ...
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Thermoelectric properties of bottom-up assembled Bi 2 S 3– x Te x nanocomposites
Bi 2 S 3– x Te x bulk nanocomposites with crystal domain sizes in the range from 50 nm to 100 nm were obtained from the reaction of Bi 2 S 3 nanorods with Te powder. The thermoelectric properties of the obtained nanocomposites were analysed in the temperature range from 0ºC to 300ºC. We observed how the thermoelectric properties of the material improved with the ...
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Nano-textured polymer surfaces with controlled wetting and optical properties using plasma processing
Wettability control is of great importance in many applications, from manufacturing of water repellent surfaces to droplet frictionless motion in microfluidics, and biocompatibility tuning. Wetting or repellent behaviour is governed by both surface chemistry and topography. In particular, super-hydrophobicity is attained by combining high-aspect-ratio (HAR) geometrical characteristics with low ...
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Advancing Precision in Plasma Enhanced ALD: The Role of the Hiden EQP Series
In materials science, precision in thin film deposition processes like Plasma Enhanced Atomic Layer Deposition (PEALD) is paramount. The ability to control film thickness and composition with high accuracy depends significantly on understanding and controlling the plasma used in the deposition process. Here, the Hiden EQP Series emerges as an essential tool for in-depth plasma analysis, offering ...
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Decomposition of benzene by non-thermal plasma processing: Photocatalyst and ozone effect
Plasma technology has some shortcomings, such as higher energy consumption and byproducts produced in the reaction process. However non-thermal plasma associated with catalyst can resolve these problems. Therefore this kind of technology was paied more and more attention to treat waste gas. A hybrid system comprising a non-thermal plasma reactor and nanometer titanium dioxide catalyst was used ...
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Effect of varying N2 pressure on DC arc plasma properties and microstructure of TiAlN coatings
Abstract Detailed knowledge of correlations between direct current (DC) cathodic arc deposition process parameters, plasma properties, and the microstructure of deposited coatings are essential for a comprehensive understanding of the DC cathodic arc deposition process. In this study we have probed the plasma, generated by DC arc on a Ti-50 at.% Al cathode in a N2 ambience, at the growth front of ...
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New information processing methods for control in magnetic confinement nuclear fusion
Thermonuclear plasmas are complex and highly nonlinear physical objects and, therefore, are the most advanced present-day devices for the study of magnetic confinement fusion. Thousands of signals have to be acquired for each experiment in order to progress the understanding that is indispensable for the final reactor. On the other hand, the resulting massive databases, more than 40 Tbytes in the ...
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Recovery of Ruthenium and Other PGMs from Spent Petrochemical Catalysts - Case Study
The recovery of platinum group metals from spent petrochemical catalysts has economic benefits by the protection of the supply chain of these valuable and rare metals, thereby helping to create a sustainable value chain in the petrochemical industry for catalysts. Introduction The platinum group metals (PGMs) are used extensively in catalysts for the petrochemical industry owing to their ...
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Why Gas-Phase Dynamics are Central to Low-Pressure Plasma Applications
Low-pressure plasma applications are pivotal in the advancement of materials science and surface engineering. They offer unparalleled precision and control in the modification and synthesis of surface coatings and films. High Power Impulse Magnetron Sputtering (HiPIMS), Diamond-Like Carbon (DLC) coatings, plasma etching, Atomic Layer Deposition (ALD), and Pulsed Laser Deposition (PLD) coatings ...
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Compound Semiconductor Innovation Advances EVs and Other Green Technologies
As the world works to reduce greenhouse gas emissions, global adoption of electric vehicles (EVs) is driving an increased demand for high-power, energy-efficient compound semiconductors, such as silicon carbide (SiC)-based components, throughout the entire EV assembly process. Renewable energy technology is now at the forefront of climate-forward research, with accelerating EV sales playing a ...
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Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres
Cathodic arc plasmas are frequently applied to deposit wear-resistant coatings like Al-Cr-N and Al-Cr-O. The metals are introduced as cathodes which are eroded due to the interaction with the plasma. Placing substrates in the plasma stream, metal ions and atoms can condensate on the substrates and a film or coating can grow. Reactive gases like N2 or O2 are added in order to enable the synthesis ...
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Feasibility analysis for biomass in cities, counties and facilities
The commercial waste industry includes all those who collect waste from the simplest “collect waste and transport to a landfill” to the more complex “collect waste and process into re-usable components and energy.” This article will cover how we can collect material and fuel a clean energy system for our immediate future, while saving clean water and air. Why Use Biomass? ...
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HOW TO USE THE CNC PLASMA CUTTING MACHINE CORRECTLY?
Correct way to use the CNC plasma cutting machine. The selection of cutting process parameters of CNC plasma cutting machine is very important to cutting quality, cutting speed and efficiency. In order to correctly use the CNC plasma cutting machine for high-quality rapid cutting, we must deeply understand and master the cutting process parameters. 1、 Cutting current It is the most important ...
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