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Plasma System Equipment Supplied In Japan
3 equipment items found
Manufactured by:Tokyo Electron Limited (TEL) based inTokyo, JAPAN
Today, to manufacture high-resolution and high-performance displays, the TFT process must become more complex, and higher productivity is required for plasma etch systems. Betelex™ supports up to 5 process chambers and realize significantly higher productivity with smaller footprint and facility cost. Betelex™ can also combine multi-process steps in ...
Manufactured by:Tokyo Electron Limited (TEL) based inTokyo, JAPAN
Tactras™ Vigus™ is a highly reliable 300mm plasma etch system that enhances etch process productivity. Scaling at advanced technology nodes makes the etch process more and more crucial. As the solution for etch process challenges, Tactras™ Vigus™ provides customized options for high aspect ratio holes, trench etch, mask and dielectric ...
Manufactured by:Advanced Energy Industries, Inc. based inDenver, COLORADO (USA)
Remote Plasma Source and Power Delivery System that Enables Abatement of Exhaust Gasses. Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch™ matching network, and plasma chamber into one compact ...