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Articles & Whitepapers

TIPS: Test-Bench for Ion Source Plasma Studies

TIPS (Test-bench for Ion Source Plasma Studies) is a 2.45 GHz Hydrogen Electron Cyclotron Resonance (ECR) plasma generator designed to be used as a flexible device to study the relationship between the engineering design of the source and the physical parameters of the generated plasma [1-5]. In many occasions, ECR plasma generators are used in ion sources for multiple applications both in ...

Experimental and numerical study of a RF plasma source in a DC-grounded electrode configuration

Capacitively coupled plasma (CCP) sources have a variety of important applications, which make use of the interaction of active species (ions and radicals) created in the plasma volume with the ...

Using Plasma Catalysis to Transform Gas Conversion Applications

Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

Effect of Mo-Cu Cathode Composition on Plasma Generation in DC Arc Synthesis

News

Advanced Energy Strengthens Leadership in RF Process Power Solutions with Acquisition of TEGAM

Advanced Energy (Nasdaq: AEIS) – a global leader in highly engineered precision power conversion measurement and control solutions – today announced that it has acquired Tegam Inc., a leading provider of metrology and calibration ...

Atomic Layer Deposition for thin-film solar

Atomic Layer Deposition for thin-film solar

DOE Invests $17 Million to Advance Carbon Utilization Projects

PyroGenesis Successfully Completes 900-kW Plasma Torch Factory Acceptance Testing; Receives Payments Totaling $936,000; Torch Shipped to Sweden

Equipment & Solutions

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Plasma Power Generators

Advanced Dual-Magnetron Sputtering Accessories. A field-proven solution for any dual-magnetron sputtering application with additional capabilities facilitating advanced process innovation.