Advanced Energy Industries, Inc.
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3 products found
Advanced Energy Industries, Inc. products
Remote Plasma Source
Litmas - Model RPS - Remote Plasma Source and Power Delivery System
Remote Plasma Source and Power Delivery System that Enables Abatement of Exhaust Gasses. Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch™ matching network, and plasma chamber into one compact chassis.
Rapid - Model OX - Ideal Remote Plasma Source for Oxygen-Based Processes
With a unique user-insertable and removable quartz chamber liner, Advanced Energy`s Rapid OX is optimal for oxygen-based processes.
Xstream - High-Quality, Chamber-Clean Remote Plasma Source
Built to outlast and outperform the competition, the Xstream remote plasma source (RPS) is ideal for chamber cleaning purposes. It features a patented ignition method and algorithm as well as a proprietary aluminum-alloy, hard-anodized chamber.