SPRUCE: Waste Gas Abatement without Fuel Gas
The new system developed by DAS Environmental Expert GmbH safely and reliably abates dangerous waste gases from semiconductor manufacturing processes
Dresden, March 20, 2012. Starting today, DAS Environmental Expert GmbH is offering customers a new system for waste gas abatement: SPRUCE is a waste gas abatement system that operates entirely without fuel gas. “The new system closes a gap in our portfolio”, says Dr. Guy Davies, Director Business Unit Gas Abatement at DAS Environmental Expert GmbH. “We noticed that the demand for such systems is very high. There are semiconductor fabs that basically want to avoid using fuel gas altogether. In addition, it is also easier to retrofit existing fabs with abatement equipment, if one can do so without installing a fuel gas feeding system. This is a big market and we are now offering the right product.” Cost-effective and reliable waste gas abatement in manufacturing plants SPRUCE was specifically designed for the waste gas abatement of CVD processes (Chemical Vapor Deposition – CVD) in the semiconductor industry. Oftentimes, the gases used in these processes are toxic, highly flammable, explosive, or harmful to the environment. SPRUCE reliably and cost-effectively eliminates residues of those gaseous substances from the manufacturing plant’s waste gases. “Process waste gases are introduced through a maximum of four separate inlets into a reactor, which is heated electrically from the outside”, explains Davies the system’s operating principle. “The heat inside the reactor breaks down the waste gases and, depending on their chemical composition, various reactions take place. In the subsequent scrubbing stage, gaseous and solid compounds generated by this process are absorbed and cooled down by a suitable scrubbing liquid.” Afterwards, the waste gases are cooled and cleaned can be released through the roof without any concern. Small footprint, low maintenance and low cost of ownership The waste gas abatement takes place without burning. Due to its small footprint, the equipment can be either installed in the fab’s basement or in direct vicinity of the CVD system itself. “SPRUCE is characterized by its low cost of ownership and high level system availability”, says Davies. The system’s integrated cleansing mechanism inside the reactor ensures long maintenance cycles and the equipment can easily be integrated into a monitoring network. For applications that require near 100% system availability, DAS Environmental Expert GmbH has developed SPRUCE DUO. The variant of SPRUCE features two reactor/scrubbing systems which can work parallel to each other. In the event of maintenance on one of the systems, the other takes over the entire waste gas treatment.
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