Adtec-RF - Impedance Matching Networks Unit
From RF Plasma Generation
Adtec specialise in custom built automatic impedance matching units. Every matching network is designed to the exact specifications of your chamber or process, ensuring a consistently fast and accurate match. A stable match = A stable plasma
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Product Details
- Automatic high-speed matching
- Custom designed to your process
- Durable and reliable design
- High-quality components respond rapidly to load changes
- A controlled, repeatable process
- A consistently stable network
Tuning parameters are stored internally on the matching unit and by using the AMV Control Software, parameters can be modified to change the matching speed, start point (via presets), matching range, and many more. For troubleshooting it is also possible to switch the system between manual and automatic setting. The AMV Control Software can be used to monitor the capacitor positions, forward power, reflected power, Vpp and Vdc (depending on customer requests) from the matching unit.
Presets and monitoring can be done via analogue control/RS232 control/Profibus (depending on customer request) and the AMV Control Software.
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